DA-30D Diaphragm Type Dry Vacuum Pump
ULVAC
Standard type / Two-stages / with power cord / with switch / with thermal protector
Applications
- Vacuum chucks, wafer and tip handling devices.
- Vacuum tweezers, medical appliances.
- Printing equipment.
- Automatic packing machines.
- Optical appliances.
- Semiconductor industry.
- Injection molding machine.
Specification
| Unit | 50Hz | 60Hz | |
|
Actual pumping speed
|
L/min | 30 | 36 |
|
Ultimate pressure※1
|
Pa (kPa) | 6.7×103 （-94.6） | |
|
Motor
|
Single phase, 100V, 200W, 4P, Split phase starting | ||
|
Full load current
|
A | 5.6 | 5.0 |
|
Weight
|
kg | 11.0 | |
|
Inlet,outlet pipe diameter（Female）
|
mm | O.D.Φ9×I.D.Φ5 (Rc 1/4) | |
|
Ambient temperature
|
℃ | 7～40 | |
|
External dimensions
|
mm | 212(W)×278(L)×224.5(H) | |